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Microelectronics Reliability

Volumn 41, Issue 12, 2001, Pages 1923-1931

Degradation of thin oxides during electrical stress

(3) Bersuker, Gennadi a Jeon, Yongjoo a Huff, Howard R a

a SEMATECH (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; CRYSTAL DEFECTS; DEGRADATION; ELECTRIC BREAKDOWN; ELECTRONS; ENERGY GAP; LEAKAGE CURRENTS; POLARIZATION; THIN FILMS;

ELECTRICAL STRESSES; THIN OXIDES;

OXIDES;

EID: 0035576149 PISSN: 00262714 EISSN: None Source Type: Journal
DOI: 10.1016/S0026-2714(01)00120-2 Document Type: Article

Times cited : (41)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.