Investigation of factors affecting electrical properties of PZT thin film capacitors

IEEE International Symposium on Applications of Ferroelectrics

Volumn , Issue , 1998, Pages 121-124

  Kanai, Hideyuki ^a   Yamashita, Yohachi ^a   Yamakawa, Koji ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTROCHEMICAL ELECTRODES; FILM GROWTH; FILM PREPARATION; HEAT TREATMENT; LEAD COMPOUNDS; MORPHOLOGY; POLARIZATION; SOL-GELS; STOICHIOMETRY; SURFACE ROUGHNESS; THIN FILM DEVICES;

REMANENT POLARIZATION; THIN FILM CAPACITORS;

CAPACITORS;

EID: 0032283783     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (3)