Effect of electrodes on crystallization and electrical properties of ferroelectric PZT films deposited by RF magnetron sputtering

Materials Research Society Symposium - Proceedings

Volumn 433, Issue , 1996, Pages 163-168

  Ea Kim, B ^a   Varniere, F ^a   Hugon, M C ^a   Agius, B ^a   Bisaro, R ^a   Olivier, J ^a  

^a UNIVERSITÉ PARIS SACLAY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTALLIZATION; ELECTRODES; FILM GROWTH; LEAD COMPOUNDS; MAGNETRON SPUTTERING; PEROVSKITE; POLYCRYSTALLINE MATERIALS; THERMAL EFFECTS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

RADIOFREQUENCY MAGNETRON SPUTTERING;

FERROELECTRIC MATERIALS;

EID: 0030416836     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-433-163     Document Type: Conference Paper

References (8)