FTIR characteristics of hydrogenated amorphous carbon films prepared by ECR-PECVD

Journal of the Korean Physical Society

Volumn 39, Issue 4 SUPPL. Part 1, 2001, Pages 713-717

  Son, Young Ho ^a   Jung, Woo Chul ^a   Jeong, Jae In ^a   Park, No Gill ^b   Kim, In Soo ^c   Bae, In Ho ^d  

^a Research Institute of Industrial Science and Technology (RIST)   (South Korea)

^b Hong Ik University   (South Korea)

^c Kyungwoon University   (South Korea)

^d Yeungnam University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035541390     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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