Relationship between field emission characteristics and hydrogen content in diamondlike carbon deposited by the layer-by-layer technique using plasma enhanced chemical vapor deposition

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 2, 1997, Pages 428-430

  Park, Kyu Chang ^a   Moon, Jong Hyun ^a   Chung, Suk Jae ^a   Oh, Myung Hwan ^a,b   Milne, W I ^a,c   Jang, Jin ^a  

^a Kyung Hee University   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

^c UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001177290     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589331     Document Type: Article

References (13)

1. V. S. Veerasamy, G. A. J. Amaratunga, C. A. Davis, W. I. Milne, and P. Hewitt, Solid State Electron. 37, 319 (1994).
2. D. R. Mckenzie, D. A. Muller, E. Kravtchin-skaia, D. Segal, and D. J. H. Cockayne, Thin Solid Films 206, 198 (1991).
3. K. K. Chan, S. R. P. Silva, and G. A. J. Amaratunga, Thin Solid Films 212, 232 (1992).
4. E. H. A. Dekempeneer, R. Jacobs, J. Smeets. J. Meneve, L. Eersels, B. Blanpain, J. Roos, and D. J. Oostra, Thin Solid Films 217, 56 (1992).
5. C. Wild and P. Koidl, Appl. Phys. Lett. 51, 1506 (1987).
6. S. Aisenberg and R. Chabot, J. Appl. Phys. 42, 2953 (1971).
7. R. Lossy, D. Pappas, R. A. Roy, and J. J. Cuomo, Appl. Phys. Lett. 61, 17 (1992).
8. A. Asano, Appl. Phys. Lett. 56, 533 (1990).
9. K. C. Park, S. K. Kim, M. Park, J. M. Jun, K. H. Lee, and J. Jang, Solar Energy Mater. Solar Cells 34, 509 (1994).
10. Y. Shimada, N. Mutsukura, and Y. Machi, J. Appl. Phys. 71, 4019 (1992).
11. K. Nakazawa, S. Ueda, M. Kumeda, A. Morimoto, and T. Shimizu, Jpn. J. Appl. Phys. 21. L617 (1992).
12. N. Mutsukura, S. Inoue, and Y. Machi, J. Appl. Phys. 71, 43 (1992).
13. J. A. Kerr, CRC Handbook of Chemistry and Physics, 74th ed. (Chemical Rubber, Boca Raton, 1994), Vol. 9, p. 123.