메뉴 건너뛰기




Volumn 109-110, Issue , 1997, Pages 335-340

Control over the lateral distribution of hydrogen content in the pulsed-laser deposited diamond-like carbon films

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; CARBON; DEPOSITION; FILM GROWTH; HYDROCARBONS; HYDROGEN; LASER ABLATION; MOLECULES; PULSED LASER APPLICATIONS; SURFACE CLEANING;

EID: 0031075048     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(96)00670-8     Document Type: Article
Times cited : (2)

References (10)
  • 9
    • 0030562172 scopus 로고    scopus 로고
    • Russian Microelectronics
    • I.A. Bogonin, A.L. Karuzskii, N.N. Melnik, Yu.A. Mityagin, V.N. Murzin, A.A. Orlikovsky, A.V. Perestoronin, P.P. Sverbil, S.D. Tkachenko, A.V. Tsikunov, N.A. Volchkov and B.G. Zhurkin, Appl. Surf. Sci. 92 (1996) 43; Mikroelectronika 25 (1996) 203 [Russian Microelectronics].
    • (1996) Mikroelectronika , vol.25 , pp. 203


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.