Optical and tribological properties of diamond-like carbon films synthesized by plasma immersion ion processing

Thin Solid Films

Volumn 355, Issue , 1999, Pages 167-173

  He, X M ^a   Walter, K C ^a   Nastasi, M ^a   Lee, S T ^b   Sun, X S ^b  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

^b CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; COMPOSITION EFFECTS; DEPOSITION; FILM PREPARATION; FRICTION; GLASS; POLYMETHYL METHACRYLATES; SILICON; SUBSTRATES; SYNTHESIS (CHEMICAL); TRIBOLOGY; WEAR RESISTANCE;

PLASMA IMMERSION ION PROCESSING (PIIP);

AMORPHOUS FILMS;

EID: 0033331682     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00652-5     Document Type: Article

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