Roughness and deposition mechanism of DLC films prepared by r.f. plasma glow discharge

Vacuum

Volumn 51, Issue 3, 1998, Pages 363-368

  Ali, Alanazi ^a   Hirakuri, Kenji K ^a   Friedbacher, Gernot ^b  

^a TOKYO DENKI UNIVERSITY   (Japan)

^b VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000285107     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(98)00115-8     Document Type: Article

References (15)

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