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Plasma Sources Science and Technology

Volumn 10, Issue 4, 2001, Pages 627-635

Modifying the IEDFs at a plasma boundary in a low-pressure RF discharge using electron beam injection

(2) Heason, D J a Bradley, J W b

a UNIVERSITY OF MANCHESTER (United Kingdom)

b Intellemetrics Ltd (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; ELECTRON BEAMS; ION BOMBARDMENT; MASS SPECTROMETERS; PARTICLE BEAM INJECTION; PLASMA COLLISION PROCESSES; PLASMA SHEATHS;

ION ENERGY DISTRIBUTION FUNCTION (IEDF);

BEAM PLASMA INTERACTIONS;

EID: 0035506416 PISSN: 09630252 EISSN: None Source Type: Journal
DOI: 10.1088/0963-0252/10/4/312 Document Type: Article

Times cited : (7)

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