Influence of electron beam on profile of sheath potentials in electron-beam-excited plasma apparatus

Plasma Sources Science and Technology

Volumn 6, Issue 4, 1997, Pages 551-560

  Miyano, Ryuichi ^a   Izumi, Shinya ^a   Kitada, Ryoji ^a   Fujii, Motoyuki ^a   Ikezawa, Shunjiro ^a   Ito, A ^a  

^a CHUBU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM PLASMA INTERACTIONS; ELECTRON BEAMS; PLASMA COLLISION PROCESSES; PLASMA ETCHING;

ELECTRON BEAM EXCITED PLASMA (EBEP) APPARATUS; ELECTRON ENERGY DISTRIBUTION FUNCTIONS (EEDF);

PLASMA SHEATHS;

EID: 0031270708     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/6/4/013     Document Type: Article

References (17)