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Surface and Coatings Technology

Volumn 86-87, Issue PART 2, 1996, Pages 648-656

Radio frequency hollow cathodes for the plasma processing technology

(1) Bardos L a

a UPPSALA UNIVERSITY (Sweden)

Author keywords

Plasma processing technology; R.f. Hollow cathode discharge

Indexed keywords

ALUMINUM SHEET; CATHODES; ELECTRIC DISCHARGES; GASES; MAGNETRONS;

HOLLOW CATHODE DISCHARGE; PLASMA PROCESSING TECHNOLOGY;

PLASMA APPLICATIONS;

EID: 13544271001 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(96)03056-3 Document Type: Article

Times cited : (78)

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