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Volumn 250-251, Issue PART 2, 2001, Pages 1169-1176

Investigation of the tribological behavior of octadecyltrichlorosilane deposited on silicon

(2) Cha, K H a Kim, D E a

a Yonsei University (South Korea)

Author keywords

Contact angle; Friction coefficient; Octadecyltrichlorosilane; Stiction

Indexed keywords

FRICTION; INTERFACIAL ENERGY; MONOLAYERS; SILICON; TRIBOLOGY;

TRIBOLOGICAL BEHAVIORS;

CHLORINE COMPOUNDS;

FRICTION; MACHINE ELEMENT; SILICON; TRIBOLOGY;

EID: 0035482535 PISSN: 00431648 EISSN: None Source Type: Journal
DOI: 10.1016/s0043-1648(01)00729-3 Document Type: Article

Times cited : (77)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.