A high-stiffness axial resonant probe for atomic force microscopy

Journal of Microelectromechanical Systems

Volumn 10, Issue 3, 2001, Pages 434-441

  Harley, Jonah A ^a,b   Kenny, Thomas W ^c  

^a IEEE   (United States)

^b AGILENT LABORATORIES   (United States)

^c Stanford University   (United States)

Author keywords

Atomic force microscopy (AFM); Force measurement; Microelectromechanical devices; Resonators; Transducers

Indexed keywords

FORCE GRADIENT; MICROMECHANICAL DEVICES; NONCONTACT ATOMIC FORCE MICROSCOPY; SHEAR FORCE MICROSCOPY;

FORCE MEASUREMENT; OSCILLATIONS; PROBES; RESONATORS; STIFFNESS; TRANSDUCERS;

ATOMIC FORCE MICROSCOPY;

EID: 0035439635     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.946802     Document Type: Article

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