Resonant microbeam accelerometers

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 2, Issue , 1995, Pages 659-662

  Burns, D W ^a   Horning, R D ^a   Herb, W R ^a   Zook, J D ^a   Guckel, H ^a  

^a HONEYWELL TECHNOLOGY CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; ELECTROSTATIC DEVICES; ENCAPSULATION; MICROMACHINING; MICROSTRUCTURE; RESONANCE; SEMICONDUCTING SILICON COMPOUNDS; SILICON SENSORS; SILICON WAFERS; THIN FILMS;

ELECTROSTATIC DRIVE; MECHANICAL GRADE POLYSILICON; OPEN WEB SUSPENSION SYSTEM; PIEZORESISTIVE SENSE; POLYSILICON VACUUM ENCAPSULATION; RESONANT MICROBEAM ACCELEROMETERS;

ACCELEROMETERS;

EID: 0029487515     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)