Measurement and modelling of the bulk plasma in magnetron sputtering sources

Surface and Coatings Technology

Volumn 97, Issue 1-3, 1997, Pages 538-543

  Bradley, J W ^a,b   Arnell, R D ^a   Armour, D G ^a  

^a UNIVERSITY OF SALFORD   (United Kingdom)

^b UNIVERSITY OF MANCHESTER   (United Kingdom)

Author keywords

Beam electrons; Fluid model; Langmuir probe; Magnetron; Pre sheath

Indexed keywords

CARRIER CONCENTRATION; ELECTRONS; IONIZATION; IONS; MAGNETIC FIELD EFFECTS; MATHEMATICAL MODELS; PLASMA DENSITY; PLASMA FLOW; PLASMA PROBES;

FLUID MODELS; LANGMUIR PROBES;

MAGNETRON SPUTTERING;

EID: 0031347609     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00214-4     Document Type: Article

References (13)

1. A.E. Wendt, M.A. Lieberman, H. Meuth, J. Vac. Sci. Technol. 6 (3) (1988) 1827.
2. G. Lister, J. Vac. Sci. Technol., in press.
3. J.A. Thornton, J. Vac. Sci. Technol. 15 (2) (1978) 171.
4. A.E. Wendt, M.A. Lieberman, J. Vac. Sci. Technol. 8 (2) (1990) 902.
5. I. Ivanov, Sv Statev, V. Orlinov, Vacuum 43 (8) (1992) 837.
6. I. Ivanov, P. Kazansky, L. Hultmann, J.-E. Sundgren, J. Phys. D: Appl. Phys. 27 (1994) 280.
7. T.E. Sheridan, M.J. Goeckner, J.A. Goree, J. Appl. Phys. 34 (1995) 4977.
8. J.W. Bradley, Plasma Sources Sci. Technol. 5 (1996) 622.
9. L. Pekker, Plasma Sources Sci. Technol. 4 (1995) 31.
10. P.C. Stangeby, G.M. MacCracken, Nucl. Fusion 30 (1990) 1225.
11. T.E. Sheridan, M.J. Goeckner, J.A. Goree, J. Vac. Sci. Technol. 9 (3) (1991) 688.
12. R.D. Gill (Ed.), Plasma Physics and Nuclear Fusion Research, Academic Press, London, New York, Sydney, Toronto, San Francisco, 1981, Ch. 7.
13. J.W. Bradley, H. Amemiya, J. Phys. Soc. Japan 63 (1994) 3295.