Electron velocity distribution functions in a sputtering magnetron discharge for the ExB direction

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 4, 1998, Pages 2173-2176

  Sheridan, T E ^a,b   Goeckner, M J ^a,c   Goree, J ^a  

^a UNIVERSITY OF IOWA   (United States)

^b AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

^c PRINCETON PLASMA PHYSICS LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032340164     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581325     Document Type: Article

References (13)

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