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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 40, Issue 8, 2001, Pages 4845-4853

Evaluation of organic monolayers formed on Si(111): Exploring the possibilities for application in electron beam nanoscale patterning

(6) Yamada, Taro a Takano, Nao a Yamada, Keiko a Yoshitomi, Shuhei a Inoue, Tomoyuki a Osaka, Tetsuya a

a WASEDA UNIVERSITY (Japan)

Author keywords

Diazonium electrolysis; Electron beam patterning; Grignard reaction; Hydrogen terminated Si(111); Metal impregnation; Nanometer scale fabrication; Organic monolayer

Indexed keywords

ELECTROLYSIS; ELECTRON BEAMS; ELECTRON IRRADIATION; OXIDATION; SILICON WAFERS;

ORGANIC MONOLAYERS;

MONOLAYERS;

EID: 0035414481 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.40.4845 Document Type: Article

Times cited : (17)

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