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Volumn 227-228, Issue , 2001, Pages 1100-1105
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Uniform and ordered self-assembled Ge dots on patterned Si substrates with selectively epitaxial growth technique
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Author keywords
A1. Nanostructures; A3. Selective epitaxy; B1. Nanomaterials
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Indexed keywords
EPITAXIAL GROWTH;
MOLECULAR BEAM EPITAXY;
NANOSTRUCTURED MATERIALS;
SELF ASSEMBLY;
SEMICONDUCTING GERMANIUM;
SEMICONDUCTOR GROWTH;
SILICON;
SUBSTRATES;
SELECTIVE EPITAXY;
SEMICONDUCTOR QUANTUM DOTS;
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EID: 0035399343
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(01)00996-4 Document Type: Conference Paper |
Times cited : (15)
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References (27)
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