Lithographic positioning of self-assembled Ge islands on Si(001)

Applied Physics Letters

Volumn 71, Issue 9, 1997, Pages 1201-1203

  Kamins, T I ^a   Williams, R Stanley ^a  

^a HEWLETT PACKARD LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DEPOSITION; LITHOGRAPHY; SILICON WAFERS; SUBSTRATES; SURFACES;

LITHOGRAPHIC POSITIONING; LOCAL OXIDATION OF SILICON; SURFACE DIFFUSION;

SEMICONDUCTING GERMANIUM;

EID: 0031237188     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.119625     Document Type: Article

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