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Volumn 30, Issue 7, 2001, Pages 861-865
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Effect of Pt barrier on thermal stability of Ti/Al/Pt/Au in ohmic contact with Si-implanted n-type GaN layers
a a a |
Author keywords
n type GaN; Ohmic contact; Specific contact resistance
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Indexed keywords
ANNEALING;
ION IMPLANTATION;
MULTILAYERS;
OXIDATION;
PLATINUM;
SEMICONDUCTING GALLIUM COMPOUNDS;
SEMICONDUCTING SILICON;
THERMODYNAMIC STABILITY;
BARRIER FUNCTION;
SPECIFIC CONTACT RESISTANCE;
OHMIC CONTACTS;
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EID: 0035391337
PISSN: 03615235
EISSN: None
Source Type: Journal
DOI: 10.1007/s11664-001-0072-5 Document Type: Article |
Times cited : (6)
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References (17)
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