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Volumn 30, Issue 7, 2001, Pages 861-865

Effect of Pt barrier on thermal stability of Ti/Al/Pt/Au in ohmic contact with Si-implanted n-type GaN layers

Author keywords

n type GaN; Ohmic contact; Specific contact resistance

Indexed keywords

ANNEALING; ION IMPLANTATION; MULTILAYERS; OXIDATION; PLATINUM; SEMICONDUCTING GALLIUM COMPOUNDS; SEMICONDUCTING SILICON; THERMODYNAMIC STABILITY;

EID: 0035391337     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-001-0072-5     Document Type: Article
Times cited : (6)

References (17)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.