Micromechanical torque magnetometer for in situ thin-film measurements

IEEE Transactions on Magnetics

Volumn 37, Issue 4 I, 2001, Pages 2770-2772

  Moreland, John ^a,b   Jander, Albrecht ^b   Beall, James A ^b   Kabos, Pavel ^b   Russek, Stephen E ^b  

^a IEEE   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Atomic force microscope (AFM); Micro cantilever; Microelectomechanical systems (MEMS); Torque magnetometer

Indexed keywords

ATOMIC FORCE MICROSCOPY; MAGNETIC FIELD EFFECTS; MAGNETIC MOMENTS; MICROELECTROMECHANICAL DEVICES; THIN FILMS; TORQUE;

MICROMECHANICAL TORQUE MAGNETOMETERS;

MAGNETOMETERS;

EID: 0035386382     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/20.951302     Document Type: Article

References (14)

1. Micromechanical detectors for ferromagnetic resonance spectroscopy
2. Cantilever magnetometry in pulsed magnetic fields
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4. Resonant torque magnetometry: A new in situ technique for determining the magnetic properties of MFM tips
5. Low temperature mechanical properties of boron doped silicon
6. High Q oscillator torque magnetometer
7. Miniature high-sensitivity quartz tuning fork alternating gradient magnetometry
8. Micromachined silicon torsional resonator for magnetic anisotropy measurement
9. Ferromagnetic resonance detection with a Torsion mode atomic force microscope
10. Microcantilever torque magnetometry of thin magnetic films
11. Ferromagnetic resonance spectroscopy with a micromechanical calorimeter sensor
12. Quality factors in micron and submicron thick cantilevers