Torsion cantilever as magnetic torque sensor

Review of Scientific Instruments

Volumn 69, Issue 9, 1998, Pages 3199-3203

  Rossel, C ^a   Willemin, M ^a,b   Gasser, A ^a   Bothuizen, H ^a   Meijer, G I ^a   Keller, H ^b  

^a IBM RESEARCH ZURICH   (Switzerland)

^b UNIVERSITY OF ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; DAMPING; ELASTICITY; MAGNETIC FIELD MEASUREMENT; MICROELECTRONIC PROCESSING; NATURAL FREQUENCIES; REACTIVE ION ETCHING; SILICON ON INSULATOR TECHNOLOGY; SILICON SENSORS; TORQUE; VIBRATIONS (MECHANICAL);

CAPACITIVE TORQUE MAGNETOMETRY; MACROSCOPIC TORSION CANTILEVER; MAGNETIC TORQUE SENSOR; MICROFABRICATION;

MAGNETOMETERS;

EID: 0032158403     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1149084     Document Type: Article

References (27)

1. R. F. Penoyer, Rev. Sci. Instrum. 30, 711 (1959).
2. D. E. Farrell, J. P. Rice, and D. M. Ginsberg, Phys. Rev. Lett. 67, 1165 (1991).
3. R. Griessen, Cryogenics 13, 375 (1973).
4. D. E. Farrell, Phys. Rev. B 51, 9148 (1995).
5. B. Janossy, R. Hergt, and L. Fruchter, Physica C 170, 22 (1990).
6. D. Zech, Ph.D. thesis, University of Zurich, Switzerland (1995).
7. M. Qvarford, K. Heeck, J. G. Lensink, R. J. Wijngaarden, and R. Griessen, Rev. Sci. Instrum. 63, 5726 (1992).
8. H. G. Schnack, R. Griessen, P. Noordeloos, and K. Heeck, Physica C 266, 285 (1996).
9. M. Chaparala, O. H. Chung, and M. J. Naughton, AIP Conf. Proc. 273, 407 (1993).
10. M. J. Naughton, J. P. Ulmet, A. Narjis, S. Askenazy, M. V. Chaparala, and A. P. Hope, Rev. Sci. Instrum. 68, 4061 (1997).
11. Oxford Instruments, Oxon, U.K., and Tau Sensors LLC, Buffalo, NY 14221-4605.
12. N. Blanc, J. Brugger, N. F. de Rooij, and U. Dürig, J. Vac. Sci. Technol. B 14, 901 (1996).
13. C. Rossel, P. Bauer, D. Zech, J. Hofer, M. Willemin, and H. Keller, J. Appl. Phys. 79, 8166 (1996).
14. M. Tortonese, H. Yamada, R. C. Barrett, and C. F. Quate, in Proceedings of Transducers 91 (IEEE, New York, 1991), p. 448;
15. M. Tortonese, R. C. Barrett, and C. F. Quate, Appl. Phys. Lett. 62, 834 (1993).
16. M. Willemin, C. Rossel, J. Brugger, M. H. Despont, H. Rothuizen, P. Vettiger, J. Hofer, and H. Keller, J. Appl. Phys. 83, 1163 (1998).
17. J. Brugger, M. Willemin, C. Rossel, G. Beljakovic, and P. Vettiger, in Proceedings of Transducers 97 (IEEE, Piscataway, NJ, 1997), p. 419.
18. A large piezoresistive cantilever fabricated in Si has been developed by Quantum Design Inc., San Diego, CA, with our collaboration for a commercial torque magnetometer option (Tq-MAG) in their Physical Properties Measurement System (PPMS).
19. F. Rudolf, A. Jornod, J. Bergqvist, and H. Leuthold, Sens. Actuators A 21, 297 (1990).
20. K. E. Petersen, Proc. IEEE 70, 420 (1982).
21. V. P. Jaecklin, Ph.D. thesis, University of Neuchatel, Switzerland (1994).
22. Dubble's Taschenbuch für Maschinenbau, edited by F. Sass and C. Bouche, 11th ed. (Springer, Berlin, 1958), Vol. 1, p. 378.
23. R. J. Roark and W. C. Young, Formulas for Stress and Strains, 5th ed. (McGraw-Hill, Singapore, 1976).
24. J. K. Bhardwaj and H. Ashraf, Proc. SPIE 2639, 224 (1995).
25. M. Willemin (unpublished).
26. Maurer Magnetic AG, CH-8627 Grüningen, Switzerland.
27. R. P. Cowburn, A. M. Moulin, and M. Welland, Appl. Phys. Lett. 71, 2202 (1997).