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Volumn 388, Issue 1-2, 2001, Pages 78-86

Characterisation of aluminium oxynitride gas barrier films

(9) Erlat, A G a Henry, B M a Ingram, J J a Mountain, D B a McGuigan, A a Howson, R P b Grovenor, C R M a Briggs, G A D a Tsukahara, Y c

a UNIVERSITY OF OXFORD (United Kingdom)

b LOUGHBOROUGH UNIVERSITY (United Kingdom)

c TOPPAN PRINTING CO LTD (Japan)

Author keywords

Aluminium oxynitride; Gas barrier films; Poly (ethylene terepthalate); Reactive magnetron sputtering

Indexed keywords

ALUMINUM COMPOUNDS; ATOMIC FORCE MICROSCOPY; COMPOSITION EFFECTS; DEFECTS; MAGNETRON SPUTTERING; MECHANICAL PERMEABILITY; OPTICAL CORRELATION; PACKAGING; POLYETHYLENE TEREPHTHALATES; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; TENSILE TESTING; TRANSMISSION ELECTRON MICROSCOPY;

GAS BARRIER FILMS; REACTIVE MAGNETRON SPUTTERING; SCANNING PROTON MICROPROBES;

PLASTIC FILMS;

PACKAGING MATERIALS; PLASTIC FILMS;

EID: 0035372260 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(01)00836-7 Document Type: Article

Times cited : (127)

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