Uniformity control of rate enhanced reactive AC sputtering

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 1999, Pages 181-185

  Dannenberg, R ^a   Newcomb, R ^a   Ryan, A ^a  

^a BOC Coating Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANODES; ARGON; ELECTRIC POWER SUPPLIES TO APPARATUS; GLASS; MAGNETIC FIELD EFFECTS; OXIDES; RATE CONSTANTS; THICKNESS CONTROL; THIN FILMS;

RATE ENHANCED REACTIVE AC SPUTTERING; THIN FILM UNIFORMITY; UNIFORMITY CONTROL;

SPUTTER DEPOSITION;

EID: 0032620914     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)