Surface defects and arc generation in reactive magnetron sputtering of aluminium oxide thin films

Surface and Coatings Technology

Volumn 115, Issue 2-3, 1999, Pages 163-171

  Koski, K ^a,b   Holsa J ^b   Juliet, P ^a  

^a CEA GRENOBLE   (France)

^b UNIVERSITY OF TURKU   (Finland)

Author keywords

Aluminium oxide; Arcing; Defects; Pulsed reactive magnetron sputtering

Indexed keywords

ALUMINA; DEFECTS; ELECTRIC POTENTIAL; MAGNETRON SPUTTERING; PRESSURE EFFECTS; SPUTTER DEPOSITION; SURFACE ROUGHNESS; THIN FILMS; TRANSPARENCY;

ARCING;

CERAMIC COATINGS;

EID: 0039721612     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00172-3     Document Type: Article

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