Material property characterization and integration issues for mesoporous silica

Proceedings of the IEEE 1999 International Interconnect Technology Conference, IITC 1999

Volumn , Issue , 1999, Pages 187-189

  Ryan, E Todd ^a   Ho, Huei Min ^a   Wu, Wen Li ^b   Ho, Paul S ^c   Gidley, David W ^d   Drage, Jim ^e  

^a SEMATECH   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^c UNIVERSITY OF TEXAS AT AUSTIN   (United States)

^d UNIVERSITY OF MICHIGAN   (United States)

^e Allied Signal   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MESOPOROUS MATERIALS; SILICA;

ALLIEDSIGNAL; INTEGRATION ISSUES; MATERIAL PROPERTY CHARACTERIZATION; MESOPOROUS SILICA; NANOGLASS; SEMATECH;

CHARACTERIZATION;

EID: 84888426890     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IITC.1999.787117     Document Type: Conference Paper

References (7)

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4. J.S. Higgins and H.C. Benoit, Polymers and Neutron Scattering, Clarendon Press, Oxford UK, 1994.
5. Allied Signal internal data, unpublished.
6. J.-H. Zhao, et al Appl. Phys. Lett. In press.
7. H.A. Hristov, B. Bolan, A.F. Yee, L. Xie and D.W. Gidley Macromolecules 1996, 29, 8507.