Effects of surface treatments on the electrical and the microstructural changes of Pd contact on p-type GaN

Journal of Electronic Materials

Volumn 30, Issue 3, 2001, Pages 170-174

  Kim, Jong Kyu ^a   Kim, Chong Cook ^a   Cho, Tae Sik ^b   Je, Jung Ho ^a   Kwak, Joon Seop ^c   Park, Yong Jo ^c   Lee, Jong Lam ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

^b Kyungpook National University   (South Korea)

^c Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

(NH4)2Sx treatment; Aqua regia treatment; Microstructure; P type GaN; Pd ohmic contact; X ray scattering

Indexed keywords

ANNEALING; BINDING ENERGY; CHEMICAL BONDS; DEGRADATION; DIFFUSION; DISSOLUTION; MICROSTRUCTURE; OXIDES; PALLADIUM; PHASE TRANSITIONS; SURFACE TREATMENT; X RAY SCATTERING;

AQUA REGIA; CONTACT RESISTIVITY; OHMIC CONTACT;

SEMICONDUCTING GALLIUM COMPOUNDS;

EID: 0035274822     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-001-0011-5     Document Type: Article

References (17)