Modeling of complete suppression of boron out-diffusion in Si1-xGex by carbon incorporation

Solid-State Electronics

Volumn 45, Issue 2, 2001, Pages 229-233

  Rajendran, K ^a   Schoenmaker, W ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

BORON; CARBON; CARRIER CONCENTRATION; DIFFUSION IN SOLIDS; MATHEMATICAL MODELS;

OUT DIFFUSION; UNDER SATURATION;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 0035247659     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1101(01)00012-0     Document Type: Article

References (18)

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