Simulation enabled decision making in advanced lithographic manufacturing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4404, Issue , 2001, Pages 68-79

  Progler, C J ^a  

^a IBM RESEARCH   (United States)

Author keywords

Lithography simulation; Predictive modeling; Process capability

Indexed keywords

CHIP SCALE PACKAGES; COMPUTER SIMULATION; DECISION MAKING; FLOWCHARTING; REAL TIME SYSTEMS;

LITHOGRAPHIC MANUFACTURING;

PHOTOLITHOGRAPHY;

EID: 0034839893     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.425236     Document Type: Conference Paper

References (18)

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15. Process dependencies of optical proximity correction
16. Aerial image measurement methods for fast aberration setup and illumination pupil verification