Zernike coefficients: Are they really enough?

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4000 (I), Issue , 2000, Pages 40-52

  Progler, Christopher ^a   Wong, Alfred ^a  

^a IBM RESEARCH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; ERROR ANALYSIS; LENSES; MATHEMATICAL MORPHOLOGY; POLYNOMIALS; WAVEFRONTS;

ZERNIKE COEFFICIENTS;

PHOTOLITHOGRAPHY;

EID: 0033683744     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.389042     Document Type: Conference Paper

References (8)