Aerial image measurement methods for fast aberration set-up and illumination pupil verification

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4346, Issue 1, 2001, Pages 394-407

  Van Der Laan, Hans ^a   Dierichs, Marcel ^a   Van Greevenbroek, Henk ^a   McCoo, Elaine ^a   Stoffels, Fred ^a   Pongers, Richard ^a   Willekers, Rob ^a  

^a ASML   (Netherlands)

Author keywords

Aberration; Aerial image; Illumination; Lens; Optical lithography; Partial coherence; Pupil; Zernike

Indexed keywords

ABERRATIONS; IMAGE RECORDING; IMAGE SENSORS; INTERFEROMETERS; LENSES; LIGHT TRANSMISSION; LIGHTING; OPTICAL CORRELATION; OPTIMIZATION; SCANNING;

PUPIL VERIFICATIONS;

PHOTOLITHOGRAPHY;

EID: 0035759059     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.435757     Document Type: Article

References (10)

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8. The fringe Zernike numbering convention is used.
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