Characterization of line width variation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4000, Issue , 2000, Pages

  Wong, Alfred K ^a   Molless, Antoinette F ^a   Brunner, Timothy A ^a   Coker, Eric ^a   Fair, Robert H ^a   Mack, George L ^a   Mansfield, Scott M ^a  

^a IBM RESEARCH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; MASKS;

SPATIAL ANALYSIS;

PHOTOLITHOGRAPHY;

EID: 0033700368     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (34)