Microphotofabrication of very small objects: pushing the limits of stereophotolithography

Molecular Crystals and Liquid Crystals Science and Technology Section A: Molecular Crystals and Liquid Crystals

Volumn 314, Issue , 1998, Pages

  Cabrera, Michel ^a   Bertsch, Arnaud ^a   Chassaing, Jacques ^a   Jezequel, Jean Yvon ^a   Andre, Jean Claude ^a  

^a DCPR (GRAPP)   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED DESIGN; COPPER; ELECTRODEPOSITION; LASER APPLICATIONS; LIGHT; LIQUID CRYSTAL DISPLAYS; MANUFACTURE; METALS; POLYMERIZATION; RESINS; SILVER PLATING;

LIGHT FLUX; MICROPHOTOFABRICATION; PHOTOPOLYMERS; STEREOPHOTOLITHOGRAPHY;

PHOTOLITHOGRAPHY;

EID: 0032056844     PISSN: 1058725X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (14)