Chemical vapor deposition coating for micromachines

Materials Research Society Symposium - Proceedings

Volumn 616, Issue , 2000, Pages 21-26

  Mani, S S ^a   Fleming, J G ^a   Sniegowski, J J ^a   De Boer, M P ^a   Irwin, L W ^a   Walraven, J A ^a   Tanner, D M ^a   Dugger, M T ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; MICROELECTROMECHANICAL DEVICES; POLYSILICON; PROCESS CONTROL; REDUCTION; STICTION; TUNGSTEN; WEAR OF MATERIALS;

TUNGSTEN COATINGS;

PROTECTIVE COATINGS;

EID: 0034448080     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-616-21     Document Type: Conference Paper

References (20)

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