Atomic-layer growth of TiO2-II thin films

Philosophical Magazine Letters

Volumn 73, Issue 3, 1996, Pages 115-119

  Aarik, J ^a   Aidla, A ^a   Uustare, T ^a  

^a UNIVERSITY OF TARTU   (Estonia)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; ANNEALING; DEPOSITION; PHASE TRANSITIONS; SUBSTRATES; SURFACES; SYNTHESIS (CHEMICAL); THIN FILMS; TITANIUM COMPOUNDS; TITANIUM DIOXIDE; WATER;

ANATASE; ATOMIC LAYER DEPOSITION; POLYMORPHS; RUTILE;

FILM GROWTH;

EID: 0030107214     PISSN: 09500839     EISSN: 13623036     Source Type: Journal    
DOI: 10.1080/095008396180911     Document Type: Article

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