Effects of smoothing on defect printability at extreme ultraviolet wavelengths

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 6, 2000, Pages 2944-2949

  Cardinale, G F ^a   Ray Chaudhuri, A K ^a   Fisher, A ^a   Mangat, P S J ^b   Wasson, J ^b   Mirkarimi, P B ^c   Gullikson, E ^d  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b MOTOROLA INC   (United States)

^c LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^d LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

IMAGING SYSTEMS; MULTILAYERS; ULTRAVIOLET RADIATION;

ULTRAVIOLET LITHOGRAPHY; ULTRAVIOLET WAVELENGTHS;

LITHOGRAPHY;

EID: 0034317843     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1324637     Document Type: Article

References (16)

1. P. J. S. Mangat et al., J. Vac. Sci. Technol. B 17, 3029 (1999).
2. S. C. Burkhart et al., Proc. SPIE 3676, 570 (1999).
3. A. K. Ray-Chaudhuri et al., J. Vac. Sci. Technol. B 17, 3024 (1999).
4. P. Yan et al., Proc. SPIE 3546, 206 (1999).
5. P. Yan et al., Proc. SPIE 3331, 638 (1998).
6. P. B. Mirkarimi and D. Stearns, Nature (submitted).
7. B. Lin, IEEE Trans. Electron Devices ED-27, 931 (1980).
8. Y. Lin and J. Bokor, J. Vac. Sci. Technol. B 15, 2467 (1997).
9. A. K. Ray-Chaudhuri et al., J. Vac. Sci. Technol. B 17, 3024 (1999).
10. S. Mansfield, R. Ferguson, L. Liegmann, A. Molless, and A. Wong, Proc. SPIE 3546, 651 (1998).
11. G. F. Cardinale et al., Proc. SPIE 3873, 429 (1999).
12. C. Cerjan and D. Stearns, Lawrence Livermore National Laboratory, Livermore, CA (personal communication).
13. ProLITH Ver. 6.1, FINLE Technologies, Inc., Austin, Tx 78759.
14. J. E. M. Goldsmith et al., Proc. SPIE 3676, 264 (1999).
15. C. Gwynn, R. Stulen, D. Sweeney, and D. Attwood, J. Vac. Sci. Technol. B 16, 3142 (1998).
16. E. Gullikson, Proc. SPIE 3331, 72 (1998).