Method for compensation of extreme-ultraviolet multilayer defects

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 6, 1999, Pages 3024-3028

  Ray Chaudhuri, A K ^a   Cardinale, G ^a   Fisher, A ^a   Yan, P Y ^b   Sweeney, D W ^c  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b INTEL CORPORATION   (United States)

^c LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0039523288     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590947     Document Type: Article

References (7)

1. S. Burkhart, Lawrence Livermore National Laboratory (private communication).
2. PROLITH/3D software is a product of Finle Technologies.
3. C. Gwyn, R. Stulen, D. Sweeney, and D. Attwood, J. Vac. Sci. Technol. B 16, 3142 (1998).
4. J. E. M. Goldsmith et al., Proc. SPIE 3676, 264 (1999).
5. R. Brainard, J. Cobb, C. Henderson, V. Rao, J. Mackevich, P. J. S. Mangat, and U. Okoroanyanwu, J. Vac. Sci. Technol. B, these proceedings.
6. GORA is copyrighted software developed at Sandia National Laboratories by A. K. Ray-Chaudhuri and A. Fisher (1998).
7. S. Mansfield, R. Ferguson, L. Liebmann, A. Molless, and A. Wong, Proc. SPIE 3546, 651 (1998).