Structure and optical properties of diamondlike carbon synthesized by plasma immersion ion processing

Journal of Materials Research

Volumn 14, Issue 5, 1999, Pages 2080-2087

  He, Xiao Ming ^a   Lee, D H ^a   Walter, K C ^a   Li, D Q ^b   Nastasi, M ^a  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

^b LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CARBON; ENERGY GAP; FRICTION; INFRARED TRANSMISSION; ION IMPLANTATION; OPTICAL MATERIALS; OPTICAL PROPERTIES; PLASMA APPLICATIONS; POLYMETHYL METHACRYLATES; SILICON WAFERS; WEAR RESISTANCE;

DIAMONDLIKE CARBON FILMS; GLASS PLATES; HIGH OPTICAL TRANSMITTANCE; LOW FRICTION COEFFICIENT; PLASMA IMMERSION ION PROCESSING; SUBSTRATE BIAS VOLTAGE;

DIAMOND FILMS;

EID: 0032652586     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.1999.0280     Document Type: Article

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