Contact angle measurements of lubricated silicon wafers and hydrogenated carbon overcoats

Langmuir

Volumn 14, Issue 17, 1998, Pages 4929-4934

  Wu, Junhua ^a   Mate, C Mathew ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ANGLE MEASUREMENT; ANNEALING; CARBON; CONTACT ANGLE; FLUORINE CONTAINING POLYMERS; INTERFACIAL ENERGY; PARAFFINS; POLYETHERS; SILICON WAFERS; SURFACE TENSION; WATER;

HYDROGENATED CARBON OVERCOATS; PERFLUOROPOLYETHER; ZISMAN METHOD;

LUBRICANTS;

EID: 0032141324     PISSN: 07437463     EISSN: None     Source Type: Journal    
DOI: 10.1021/la980189g     Document Type: Article

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