Computational aspects of laser radiometrie multiparameter fit for carrier transport property measurements in si wafers

Journal of the Electrochemical Society

Volumn 147, Issue 2, 2000, Pages 687-698

  Rodriguez, M E ^a,b,c   Mandelis, A ^a   Pan, G ^a   Nicolaides, L ^a   Garcia, J A ^a   Riopel, Y ^a  

^a UNIVERSITY OF TORONTO   (Canada)

^b TELSCC   (Canada)

^c INSTITUTO POLITÉCNICO NACIONAL   (Mexico)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; ELECTRIC CONDUCTIVITY; ELECTRON TRANSPORT PROPERTIES; HOT CARRIERS; MATHEMATICAL MODELS; RADIOMETRY; THERMAL DIFFUSION;

ELECTRONIC DEFECTS; ELECTRONIC DIFFUSION COEFFICIENT; LASER INFRARED PHOTOTHERMAL RADIOMETRIC MULTIPARAMETER FIT;

SILICON WAFERS;

EID: 0034140154     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1393254     Document Type: Article

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