Novel method for minority-carrier mobility measurement using photoconductance decay with chemically passivated and plasma damaged surfaces

Journal of Applied Physics

Volumn 80, Issue 7, 1996, Pages 3897-3903

  Stephens, A W ^a   Green, M A ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON TETRAFLUORIDE; CARRIER LIFETIME; CHEMICAL PASSIVATION; MINORITY CARRIER MOBILITY; PHOTOCONDUCTANCE DECAY; SURFACE RECOMBINATION VELOCITY;

CALCULATIONS; DIFFUSION; ELECTRIC RESISTANCE MEASUREMENT; ERROR ANALYSIS; ETHANOL; IODINE; PASSIVATION; PHOTOELECTRICITY; PLASMA ETCHING; SILICON WAFERS; SURFACES; THIN FILMS;

CHARGE CARRIERS;

EID: 0030270514     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.363346     Document Type: Article

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