Theoretical and experimental aspects of three-dimensional infrared photothermal radiometry of semiconductors

Journal of Applied Physics

Volumn 85, Issue 10, 1999, Pages 7392-7397

  Ikari, Tetsuo ^a,b   Salnick, Alex ^a,c   Mandelis, Andreas ^a  

^a UNIVERSITY OF TORONTO   (Canada)

^b UNIVERSITY OF MIYAZAKI   (Japan)

^c Therma Wave Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION; HEAT CONDUCTION; INFRARED RADIATION; MATHEMATICAL MODELS; PLASMA WAVES; SILICON WAFERS; SURFACE PHENOMENA;

CARRIER DIFFUSION CONSTANT; INFRARED PHOTOTHERMAL RADIOMETRY (PTR); SURFACE RECOMBINATION; THERMAL WAVES;

RADIOMETRY;

EID: 0032606710     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.369368     Document Type: Article

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