Hardness enhancement by compositionally modulated structure of Ti/TiN multilayer films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 3, 1998, Pages 1272-1276

  Kusano, E ^a   Kitagawa, M ^a   Nanto, H ^a   Kinbara, A ^a  

^a KANAZAWA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001666152     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581273     Document Type: Article

References (12)

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