Structural characterization of multilayered sputtered TiN/ZrN coatings

Surface and Coatings Technology

Volumn 100-101, Issue 1-3, 1998, Pages 65-71

  Tavares, C J ^a   Rebouta, L ^a   Almeida, B ^b   Bessa E Sousa, J ^b  

^a UNIVERSITY OF MINHO   (Portugal)

^b UNIVERSITY OF PORTO   (Portugal)

Author keywords

Interfaces; Intermixing; Multilayers; Physical Vapour Deposition; X ray diffraction

Indexed keywords

CRYSTAL LATTICES; INTERFACES (MATERIALS); MAGNETRON SPUTTERING; SURFACE ROUGHNESS; TITANIUM NITRIDE; VAPOR DEPOSITION; X RAY CRYSTALLOGRAPHY; ZIRCONIUM COMPOUNDS;

PHYSICAL VAPOR DEPOSITION; ZIRCONIUM NITRIDE;

MULTILAYERS;

EID: 0032028760     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00589-6     Document Type: Article

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