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Volumn 317, Issue 1-2, 1998, Pages 266-269
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Growth and micro structure of sputtered Ag/Cu multilayers
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Author keywords
Growth; Magnetron; Microstructure
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Indexed keywords
COPPER;
CRYSTAL MICROSTRUCTURE;
CRYSTALLINE MATERIALS;
FILM GROWTH;
INTERFACES (MATERIALS);
MAGNETRON SPUTTERING;
MORPHOLOGY;
SILVER;
TRANSMISSION ELECTRON MICROSCOPY;
COLUMNAR STRUCTURE;
CROSS SECTIONAL TRANSMISSION ELECTRON MICROSCOPY;
INTERFACE WAVINESS;
MULTILAYERS;
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EID: 0032050556
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(97)00525-7 Document Type: Article |
Times cited : (11)
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References (17)
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