Structural studies of TiN/ZrN multilayer coating deposited by physical vapour deposition

Journal of Materials Science

Volumn 31, Issue 22, 1996, Pages 5907-5914

  Wadsworth, I ^a   Lewis, D B ^a   Williams, G ^a  

^a SHEFFIELD HALLAM UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL LATTICES; CRYSTAL ORIENTATION; CRYSTAL STRUCTURE; LATTICE CONSTANTS; MAGNETRONS; MULTILAYERS; STOICHIOMETRY; TITANIUM NITRIDE; TRANSMISSION ELECTRON MICROSCOPY; VAPOR DEPOSITION; X RAY DIFFRACTION ANALYSIS;

CROSS SECTIONAL TRANSMISSION ELECTRON MICROSCOPY; LOW ANGLE X RAY DIFFRACTION; MAGNETRON PHYSICAL VAPOR DEPOSITION; ZIRCONIUM NITRIDE;

INORGANIC COATINGS;

EID: 0030283996     PISSN: 00222461     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF01152140     Document Type: Article

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