He-induced cavity formation in silicon upon high-temperature implantation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 161, Issue , 2000, Pages 1038-1042

  Fichtner, P F P ^a   Peeva, A ^b   Behar, M ^a   Azevedo, G De M ^a   Maltez, R L ^a   Koegler, R ^b   Skorupa, W ^b  

^a FEDERAL UNIVERSITY OF RIO GRANDE DO SUL   (Brazil)

^b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; HELIUM; HIGH TEMPERATURE OPERATIONS; MICROSTRUCTURE; NUCLEATION; RADIATION EFFECTS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTING SILICON; SINGLE CRYSTALS; TRANSMISSION ELECTRON MICROSCOPY;

BUBBLE NUCLEATION PROCESS; CAVITY FORMATION; CHANNELING SPECTROMETRY; ELASTIC RECOIL DETECTION ANALYSIS; MICROSTRUCTURE EVOLUTION;

ION IMPLANTATION;

EID: 0033885661     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(99)00888-5     Document Type: Article

References (16)

1. S.M. Myers, D.M. Bishop, D.M. Follstaedt, H.J. Stein, W.R. Wampler, Mater. Res. Soc. Symp. Proc. 283 (1993) 549.
2. W. Skorupa, N. Hatzopoulos, R.A. Yankov, A.B. Danilin, Appl. Phys. Lett. 67 (1995) 2992.
3. B. Holländer, S. Mantl, R. Liedtke, S. Mesters, H.J. Herzog, H. Kibbel, T. Hackbarth, Nucl. Instr. and Meth. B 148 (1999) 200.
4. M. Bruel, Nucl. Instr. and Meth. B 108 (1996) 313.
5. J. Chen, P. Jung, H. Trinkaus, Phys. Rev. Lett. 82 (1999) 2709.
6. P.F.P. Fichtner, J.R. Kaschny, R.A. Yankov, A. Mücklich, U. Kreißig, W. Skorupa, Appl. Phys. Lett. 70 (1997) 732.
7. V. Rainieri, P.G. Fallica, A. Battaglia, M. Barbagallo, U.S. Campisano, Appl. Phys. Lett. 78 (1995) 3727.
8. F. Corni, G. Calzolari, S. Frabboni, C. Nobili, G. Ottaviani, R. Tonini, G.F. Cerofolini, D. Leone, M. Servidori, R.S. Brusa, G.P. Karwasz, N. Tiengo, A. Zecca, J. Appl. Phys. 85 (1999) 1401.
9. J.R. Kaschny, P.F.P. Fichtner, A. Mücklich, U. Kreißig, R.A. Yankov, W. Skorupa, Nucl. Instr. and Meth. B 136-138 (1998) 583.
10. P.F.P. Fichtner, J.R. Kaschny, A. Kling, H. Trinkaus, R.A. Yancov, A. Mücklich, W. Skorupa, F.C. Zawislak, L. Amaral, M.F. da Silva, J.C. Soares, Nucl. Instr. and Meth. B 136-138 (1998) 460.
11. P.F.P. Fichtner, J.R. Kaschny, M. Behar, R.A. Yankov, A. Muecklich, W. Skorupa, Nucl. Instr. and Meth. B 148 (1999) 329.
12. W. Chu, J.W. Mayer, M.A. Nicolet (Eds.), Backscattering Spectrometry, Academic Press, New York, 1978.
13. J.H.R. dos Santos, P.L. Grande, H. Boudinov, M. Behar, R. Stoll, C. Klatt, S. Kalbitzer, Nucl. Instr. and Meth. B 106 (1995) 51.
14. F. Schiettekatte, G.G. Ross, in: Proceedings of the 14th International Conference on Applied Accelerators in Research and Industry, AIP, New York, 1996, p. 375.
15. STOP(95) code, J.F. Ziegler, J.P. Biersack, U. Littmark, The Stopping and Ranges of Ions in Solids, Pergamon Press, New York, 1985.
16. M.T. Robinson, Nucl. Instr. and Meth. B 48 (1990) 408.