Helium bubbles in silicon: Study of the residual helium content using elastic recoil detection analysis

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 136-138, Issue , 1998, Pages 583-586

  Kaschny, J R ^a   Fichtner, P F P ^a,b   Muecklich, A ^a   Kreissig, U ^a   Yankov, R A ^a   Skorupa, W ^a  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^b FEDERAL UNIVERSITY OF RIO GRANDE DO SUL   (Brazil)

Author keywords

Defects; Helium; Ion implantation; Radiation effects; Voids

Indexed keywords

ACTIVATION ENERGY; ANNEALING; CRYSTAL DEFECTS; CRYSTAL MICROSTRUCTURE; HELIUM; ION BEAMS; ION BOMBARDMENT; ION IMPLANTATION; MORPHOLOGY; RADIATION EFFECTS; TRANSMISSION ELECTRON MICROSCOPY;

ELASTIC RECOIL DETECTION ANALYSIS (ERDA);

SEMICONDUCTING SILICON;

EID: 0032019713     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00713-1     Document Type: Article

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