Effects of carbon monoxide addition to chlorine plasma-treated platinum films

Applied Surface Science

Volumn 156, Issue 1, 2000, Pages 9-15

  Kim, Jin Hong ^a   Woo, Seong Ihl ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON MONOXIDE; CHLORINE; COMPOSITION EFFECTS; PLASMA ETCHING; SCANNING ELECTRON MICROSCOPY; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

CHLORINE PLASMA; PLASMA CHLORIDE;

PLATINUM;

EID: 0033874921     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(99)00512-7     Document Type: Article

References (18)

1. R.E. Jones Jr., Solid State Technol. 10 (1997) 201.
2. J.F. Scott, Integr. Ferroelectr. 20 (1998) 15.
3. S. DeOrnellas, P. Rajora, A. Cofer, Integr. Ferroelectr. 17 (1997) 395.
4. D.S. Yoon, H.K. Baik, S.M. Lee, J. Vac. Sci. Technol. A 15 (5) (1997) 2781.
5. T. Shibano, T. Oomori, J. Vac. Sci. Technol. B 15 (5) (1997) 1747.
6. C.E. Farrell, K.R. Milkove, C. Wang, D.E. Kotecki, Integr. Ferroelectr. 16 (1997) 109.
7. K.R. Mikove, C.X. Wang, J. Vac. Sci. Technol. A 15 (3) (1997) 596.
8. C.W. Chung, H.G. Song, J. Electrochem. Soc. 144 (11) (1997) L294.
9. T. Shibano, K. Nakamura, T. Oomori, J. Vac. Sci. Technol. A 16 (2) (1998) 502.
10. J.H. Kim, S.I. Woo, B.Y. Nam, W.J. Yoo, IEEE Trans. Electron Devices 46 (5) (1999) 984.
11. D. Briggs, M.P. Seah, Pratical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy, Wiley, Chichester, 1987.
12. D.R. Lide, CRC Handbook of Chemistry and Physics, CRC Press, Boca Raton, 1994.
13. J.F. Moulder, W.F. Stickle, P.E. Sobol, K.D. Bomben, Handbook of X-ray Photoelectron Spectroscopy, Perkin-Elmer, Minnesota, 1992.
14. K.S. Kim, N. Winograd, R.E. Davis, J. Am. Chem. Soc. 93 (23) (1971) 6296.
15. J. Escard, B. Pontvianne, M.T. Chenebaux, J. Cosyns, Bull. Soc. Chim. Fr. (1975) 2399.
16. S.P. Paker, McGraw-Hill Encyclopedia of Chemistry, McGraw-Hill, New York, 1993.
17. G.M. Bancroft, I. Adams, L.L. Coatsworth, C.D. Bennewitz, J.D. Brown, W.D. Westwood, Anal. Chem. 47 (3) (1975) 586.
18. J.H. Kim, S.I. Woo, Chem. Mater 10 (1998) 3576.