Insight into the dry etching of fence-free patterned platinum structures

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 3, 1997, Pages 596-603

  Milkove, K R ^a   Wang, C X ^b  

^a IBM T J WATSON RESEARCH CENTER   (United States)

^b IBM MICROELECTRONICS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001564757     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580690     Document Type: Article

References (22)

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